Technology:
A research team led
by Shinichi Yokota of Tokyo Institute of Technology developed a micropump 50
times more powerful than the standard micropump. The newly developed micropump
uses liquid called electro conjugate fluid (ECF) as the driving source. ECF is
mainly insulating liquid of the fluorine system, and it produces strong jets
between electrodes if voltage is applied. The micropump can be miniaturized
easily without the necessity of adding any extra equipment because it can be
driven only by voltage. In addition, it can be easily mass produced at a low
cost because the micro electromechanical system (MEMS) is used for the
production. The research team plans to apply it to micro robot hand and
artificial muscle.
The new micropump
consists of triangle poles and slit-like electrodes put on each of the poles.
The MEMS process that combines thick film resist and electroplating is used for
the production. Both the slit width and the clearance between electrodes are
200 micrometers. When voltage is applied to the micropump connected to a
container that contains ECF, ECF flows along the channel. Power of the pump can
be adjusted by the amount of voltage. A unit is 0.5 mm high, 0.7-1.0 mm wide,
and 2 mm long. It is possible to increase the discharge pressure and flow rate
by connecting units in series and in parallel. A new micropump composed of
three units in parallel and 10 units in series exhibited power density of 150
mW when 4 kg voltage is applied. Because it is five times more powerful than the
standard micropump, it can be used for a micro robot that needs a certain
amount of force for driving.
The newly developed
micropump 50 times
more powerful than the standard micropump
more powerful than the standard micropump
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